DSpace at KISTKIST Patent2011

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dc.contributor.author한승희-
dc.contributor.author전준홍-
dc.contributor.author문선우-
dc.contributor.author최진영-
dc.contributor.author박원웅-
dc.date.accessioned2024-01-12T17:32:42Z-
dc.date.available2024-01-12T17:32:42Z-
dc.date.issued2013-05-20-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/92626-
dc.title플라즈마 이온주입 장치 및 방법-
dc.typePatent-
dc.date.registration2013-05-20-
dc.date.application2011-09-08-
dc.identifier.patentRegistrationNumber10-1267459-
dc.identifier.patentApplicationNumber10-2011-0091468-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2011
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