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Control of GaAs lateral growth rate by CBr4 during metalorganic chemical vapor deposition on patterned substrates

Title
Control of GaAs lateral growth rate by CBr4 during metalorganic chemical vapor deposition on patterned substrates
Authors
김성일; 김무성; 김용; 손창식; 황성민; 민병돈; 김은규; 민석기
Keywords
MOCVD; CBr4; GaAs
Issue Date
1996-08
Publisher
Applied physics letters
Citation
VOL 69, NO 6, 815-817
URI
https://pubs.kist.re.kr/handle/201004/9273
ISSN
00036951
Appears in Collections:
KIST Publication > Article
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