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Characteristics of ZnO thin films deposited onto Al/Si substrates by r.f. magnetron sputtering

Title
Characteristics of ZnO thin films deposited onto Al/Si substrates by r.f. magnetron sputtering
Authors
윤기현; 최지원; 이동헌
Keywords
r.f. magnetron sputtering; orientation; resistivity; non-stoidiometry
Issue Date
1997-01
Publisher
Thin solid films.
Citation
VOL 302, 116-121
URI
https://pubs.kist.re.kr/handle/201004/9276
Appears in Collections:
KIST Publication > Article
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