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Design and Construction of an EUV Grating Spectrometer for the High Harmonic Generation at 13.5 nm

Other Titles

고차조화파발생 13.5nm 극자외선 회절격자분광기 설계제작

Authors

김점술; 함용희; 정재룡; 권승호; Sung Hamin; Kim Yong Soo; Jhon, Young Min

Citation

차세대 리소그래피 학술대회, v.F2-III-3, pp.72 - 73

Keywords

고차조화파; 극자외선; 분광기

URI

https://pubs.kist.re.kr/handle/201004/92794

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KIST Conference Paper > Others

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