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The study of Ge2Sb2Te5 films surface after chemical mechanical planarization in various slurries condition

Authors

Hyun-Soo, Kim; Jaihyung Won; Kim, Yong Tae; Manyoung Sung

Publisher

MRS

Citation

2013 MRS Spring Meeting

URI

https://pubs.kist.re.kr/handle/201004/92864

Appears in Collections:

KIST Conference Paper > Others

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