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고품질 박막 증착을 위한 황산을 이용한 사파이어 기판 전처리 방법

Author

최원국; 최지원; 윤석진; 노영수; 김현재

Assignee

한국과학기술연구원

Regitration Date

2006-01-10

Registration No.

0543859

Application Date

2003-10-30

Application No.

2003-0076164

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/93532

Appears in Collections:

KIST Patent > 2003

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