DSpace at KISTKIST Patent2003

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dc.contributor.author최원국-
dc.contributor.author최지원-
dc.contributor.author윤석진-
dc.contributor.author노영수-
dc.contributor.author김현재-
dc.date.accessioned2024-01-12T18:30:10Z-
dc.date.available2024-01-12T18:30:10Z-
dc.date.issued2006-01-10-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93532-
dc.title고품질 박막 증착을 위한 황산을 이용한 사파이어 기판 전처리 방법-
dc.typePatent-
dc.date.registration2006-01-10-
dc.date.application2003-10-30-
dc.identifier.patentRegistrationNumber0543859-
dc.identifier.patentApplicationNumber2003-0076164-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2003
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