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dc.contributor.author김용태-
dc.contributor.author김성일-
dc.contributor.author김영환-
dc.contributor.author심선일-
dc.contributor.author김춘근-
dc.date.accessioned2024-01-12T18:30:11Z-
dc.date.available2024-01-12T18:30:11Z-
dc.date.issued2006-01-09-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93534-
dc.title식각 선택비가 큰 버퍼층을 이용한 자기정렬 강유전체 게이트 트랜지스터의 제조방법-
dc.typePatent-
dc.date.registration2006-01-09-
dc.date.application2003-08-26-
dc.identifier.patentRegistrationNumber0543528-
dc.identifier.patentApplicationNumber2003-0059188-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2003
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