DSpace at KIST: Crystallization of amorphous silicon by excimer laser annealing with a line shape beam having a gaussian profile

Browse

My Repository

DSpace at KISTKIST Publication Article

Crystallization of amorphous silicon by excimer laser annealing with a line shape beam having a gaussian profile

Title: Crystallization of amorphous silicon by excimer laser annealing with a line shape beam having a gaussian profile

Authors: 김동환; 최상삼; 주홍; 전영민

Keywords: laser-induced crystallization

Issue Date: 1994-10

Publisher: Japanese Journal of Applied Physics, Part 2 - Letters

Citation: v. 33, no. 10B, L1438-L1441

URI: https://pubs.kist.re.kr/handle/201004/9380

ISSN: 0021-4922

Appears in Collections:: KIST Publication > Article

Files in This Item:

Export: RIS (EndNote); XLS (Excel); XML

Show Full Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE