화학증착법에 의한 고순도 구리박막의제조 방법

Author
최형수황순택임종주조영상
Assignee
한국과학기술연구원
Regitration Date
1995-11-23
Registration No.
92017
Application Date
1993-03-30
Application No.
1993-0005061
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/93802
Appears in Collections:
KIST Patent > Others
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