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dc.contributor.author최형수-
dc.contributor.author황순택-
dc.contributor.author임종주-
dc.contributor.author조영상-
dc.date.accessioned2024-01-12T18:33:32Z-
dc.date.available2024-01-12T18:33:32Z-
dc.date.issued1995-11-23-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/93802-
dc.title화학증착법에　의한　고순도　구리박막의제조　방법-
dc.typePatent-
dc.date.registration1995-11-23-
dc.date.application1993-03-30-
dc.identifier.patentRegistrationNumber92017-
dc.identifier.patentApplicationNumber1993-0005061-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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