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박막제조용　진공장치의　산소분압측정　방법　및　장치

Author

조운조; 최상삼; 한택상; 김영환

Assignee

한국과학기술연구원

Regitration Date

1998-09-01

Registration No.

162871

Application Date

1995-12-14

Application No.

95-49978

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/94115

Appears in Collections:

KIST Patent > Others

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