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dc.contributor.author민석기-
dc.contributor.author곽성관-
dc.contributor.author김영석-
dc.contributor.author김은규-
dc.date.accessioned2024-01-12T19:01:11Z-
dc.date.available2024-01-12T19:01:11Z-
dc.date.issued2001-01-11-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/94174-
dc.title질소플라즈마를　이용한　선택적　금속 박막　증착방법　및　그를　이용한　다층금속　연결배선　방법-
dc.typePatent-
dc.date.registration2001-01-11-
dc.date.application1998-03-12-
dc.identifier.patentRegistrationNumber286253-
dc.identifier.patentApplicationNumber98-8282-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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