포토레지스트용 공중합체 및 그 제조방법

Author
안광덕한동근김종만구재선문성윤이상균이재형
Assignee
한국과학기술연구원
Regitration Date
1999-11-01
Registration No.
241116
Application Date
1998-01-13
Application No.
98-751
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/94187
Appears in Collections:
KIST Patent > Others
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