DSpace at KISTKIST PublicationArticle

Characteristics of a nitrogen gas-pulsed electron cyclotron resonance plasma

Title
Characteristics of a nitrogen gas-pulsed electron cyclotron resonance plasma
Authors
박용주; 김은규; 민석기; K. Ozasa; P. O'Keeffe; Y. Aoyagi
Keywords
질소 가스펄스 플라즈마; ECR; 전자온도; transient profile
Issue Date
1996-07
Publisher
응용물리; Ungyong Mulli (The Korean physical society)
Citation
VOL 9, NO 4, 444-449
URI
https://pubs.kist.re.kr/handle/201004/9429
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Full Item Record


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE