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용융염 티타나이징을 이용하여 제조한 질화물 회로 기판 및 이의 제조방법

Author

변지영; 김상훈; 최광덕

Assignee

한국과학기술연구원

Regitration Date

2022-05-11

Registration No.

10-2398247

Application Date

2020-04-23

Application No.

10-2020-0049415

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/94348

Appears in Collections:

KIST Patent > 2020

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