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Development of Coherent EUV Light Source for EUV Metrology

Other Titles

극자외선 측정기술용 결맞는 극자외선 광원개발

Authors

Sung Hamin; Kim Yong Soo; Cho, Woon Jo; Park, Min-Chul; 함용희; 김점술; KIM, JAE HUN; Woo, Deok Ha; Lee, Seok; 이주한; Kim, Yong Tae; Jhon, Young Min

Citation

차세대 리소그래피 학술대회, v.2, pp.113 - 114

Keywords

High Harmonic Generation; Extreme Ultra Violet

URI

https://pubs.kist.re.kr/handle/201004/94395

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KIST Conference Paper > Others

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