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Effect of moisture adsorption inside the chamber on the formation of cubic boron nitride thin film

Authors

Lee Eun sook; JONG-KEUK, PARK; Lee, Wook Seong; Baik, Young Joon

Citation

ICMCTF 2012

URI

https://pubs.kist.re.kr/handle/201004/94521

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KIST Conference Paper > Others

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