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Effect of deposition temperature on cubic boron nitride thin film deposited by UBM method with a nanocrystalline diamond buffer layer

Authors

Lee Eun sook; JONG-KEUK, PARK; Lee, Wook Seong; 성태연; Baik, Young Joon

Citation

ICMCTF 2012

URI

https://pubs.kist.re.kr/handle/201004/94523

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KIST Conference Paper > Others

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