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Ladder-like Polymethylsilsesquioxane (PMSQ) for Interlayer Dielectric (ILD) Application

Authors

Lee; Hwang, Seung Sang; Baek Kyung Youl

Citation

222nd ECS meeting

URI

https://pubs.kist.re.kr/handle/201004/94540

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KIST Conference Paper > Others

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