화학 기상 증착법을 이용하여 성장된 고품질 h-BCN 박막과 그 제조방법

Author
김명종서태훈안석훈장세규이헌수이상현손동익김승민여동규김희수김수민
Assignee
한국과학기술연구원
Regitration Date
2020-09-29
Registration No.
10-2163154
Application Date
2018-08-14
Application No.
10-2018-0094963
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/94784
Appears in Collections:
KIST Patent > 2018
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