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dc.contributor.author서민아-
dc.contributor.author이상훈-
dc.contributor.author김진수-
dc.contributor.author박규환-
dc.contributor.author최종호-
dc.contributor.author김철기-
dc.date.accessioned2024-01-12T19:32:13Z-
dc.date.available2024-01-12T19:32:13Z-
dc.date.issued2019-11-19-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/94830-
dc.title메타물질 기반 센싱 소자를 이용한 박막의 전기적 특성 비접촉식 관찰 방법-
dc.typePatent-
dc.date.registration2019-11-19-
dc.date.application2018-01-18-
dc.identifier.patentRegistrationNumber10481188-
dc.identifier.patentApplicationNumber15/874415-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2018
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