태양전지용 실리콘 반도체 웨이퍼 나노구조 제조기술

Author
김인호김원목이택성이경석김주영정두석이도권천시은최경진이욱성
Assignee
한국과학기술연구원
Regitration Date
2017-08-28
Registration No.
10-1773951
Application Date
2016-06-15
Application No.
2016-0074557
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/94899
Appears in Collections:
KIST Patent > 2016
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