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dc.contributor.author김인호-
dc.contributor.author김원목-
dc.contributor.author이택성-
dc.contributor.author이경석-
dc.contributor.author김주영-
dc.contributor.author정두석-
dc.contributor.author이도권-
dc.contributor.author천시은-
dc.contributor.author최경진-
dc.contributor.author이욱성-
dc.date.accessioned2024-01-12T19:33:09Z-
dc.date.available2024-01-12T19:33:09Z-
dc.date.issued2017-08-28-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/94899-
dc.title태양전지용 실리콘 반도체 웨이퍼 나노구조 제조기술-
dc.typePatent-
dc.date.registration2017-08-28-
dc.date.application2016-06-15-
dc.identifier.patentRegistrationNumber10-1773951-
dc.identifier.patentApplicationNumber2016-0074557-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2016
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