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CIS계 박막 코팅 장치

Author

이도권; 김홍곤; 김진영; 김봉수; 고민재

Assignee

한국과학기술연구원

Regitration Date

2014-02-27

Registration No.

10-1370637

Application Date

2012-10-19

Application No.

10-2012-0116573

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/95426

Appears in Collections:

KIST Patent > 2012

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