DSpace at KISTKIST Patent2009

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dc.contributor.author우덕하-
dc.contributor.author김선호-
dc.contributor.author이석-
dc.contributor.author김신근-
dc.contributor.author전영민-
dc.contributor.author김재헌-
dc.contributor.author변영태-
dc.date.accessioned2024-01-12T20:31:37Z-
dc.date.available2024-01-12T20:31:37Z-
dc.date.issued2012-05-31-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/95909-
dc.title발열부 일체형 진공 박막 증착용 분자빔 증발원, 그제작 방법 및 증발기-
dc.typePatent-
dc.date.registration2012-05-31-
dc.date.application2009-11-24-
dc.identifier.patentRegistrationNumber1153934-
dc.identifier.patentApplicationNumber10-2009-0114068-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2009
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