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반도체 제조 장비용 열용사 코팅물질, 그 제조방법 및 코팅방법

Author

석현광; 백경호; 이해원

Assignee

한국과학기술연구원

Regitration Date

2010-01-29

Registration No.

10-0940812

Application Date

2009-11-09

Application No.

10-2009-0107645

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/96045

Appears in Collections:

KIST Patent > 2009

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