DSpace at KISTKIST Patent2007

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dc.contributor.author석현광-
dc.contributor.author백경호-
dc.contributor.author이해원-
dc.date.accessioned2024-01-12T20:33:32Z-
dc.date.available2024-01-12T20:33:32Z-
dc.date.issued2012-11-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/96047-
dc.title반도체 제조 장비용 열용사 코팅물질, 그 제조방법 및 코팅방법-
dc.typePatent-
dc.date.registration2012-11-01-
dc.date.application2007-06-21-
dc.identifier.patentRegistrationNumberI375734-
dc.identifier.patentApplicationNumber96122264-
dc.publisher.countryZZ-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2007
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