디렉트 모니터링 전기로를 이용한 수평대역 용융 단결정 성장장치

Author
민석기한철원박승철박용주
Assignee
한국과학기술연구원
Regitration Date
1992-08-25
Registration No.
5,141,721
Application Date
1991-04-22
Application No.
07/689,167
Country
US
URI
https://pubs.kist.re.kr/handle/201004/96595
Appears in Collections:
KIST Patent > Others
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