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스퍼터링 조건에 따른 BST 박막의 수소가스 감지 및 유전 특성

Authors

Lee Chil-hyoung; Choi Doo-Jin; Oh, Young-Jei

Issue Date

2011-11

Citation

2011년 한국센서학회 종합학술대회

Keywords

BST thin-film; Dielectric property; Hydrogen gas-sensing

URI

https://pubs.kist.re.kr/handle/201004/96690

Appears in Collections:

KIST Conference Paper > Others

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