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CBr4개스를　이용한　반도체　패턴　측면의　에피성장율　조절방법

Author

민석기; 김성일; 김무성

Assignee

한국과학기술연구원

Regitration Date

1999-02-02

Registration No.

5,865,888

Application Date

1996-07-22

Application No.

08/684,721

Country

US

URI

https://pubs.kist.re.kr/handle/201004/96971

Appears in Collections:

KIST Patent > Others

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