레이저를 이용한 내플라즈마 코팅막 형성방법

Author
전호정박재호이원령석현광옥명렬김유찬한형섭
Assignee
한국과학기술연구원
Regitration Date
2023-02-01
Registration No.
10-2496309-00-00
Application Date
2020-09-25
Application No.
10-2020-0124643
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/97169
Appears in Collections:
KIST Patent > 2020
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