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Filling-up effect of micro-gap by interfacial oxide growing in SFB process

Title: Filling-up effect of micro-gap by interfacial oxide growing in SFB process

Authors: 강광남; 주병권; 이재옥; 김철주; 오명환; 차균현; 이명복

Keywords: interfacial oxide growing

Issue Date: 1991-08

Publisher: 전자공학회논문지

Citation: VOL 28A, NO 2, 71-76

URI: https://pubs.kist.re.kr/handle/201004/9793

Appears in Collections:: KIST Publication > Article

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