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dc.contributor.author김주선-
dc.contributor.author권은석-
dc.contributor.author최선희-
dc.contributor.author김병국-
dc.date.accessioned2024-01-12T22:34:08Z-
dc.date.available2024-01-12T22:34:08Z-
dc.date.issued2014-07-14-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/98344-
dc.title나노선 박막, 나노선 및 물리 증착법을 이용한 나노선 박막의 제조방법-
dc.typePatent-
dc.date.registration2014-07-14-
dc.date.application2012-11-14-
dc.identifier.patentRegistrationNumber1421130-
dc.identifier.patentApplicationNumber2012-0129066-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2012
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