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ZnO-SnO2 co-sputtering 박막의 전기적, 광학적 및 열적 특성 고찰

Authors

Kim Jin-soo; 성태연; KIM, WON MOK

Issue Date

2011-02

Citation

한국진공학회 제40회 동계정기학술대회

Keywords

Transparent conducting oxide; co-sputtering; ZnO; SnO2

URI

https://pubs.kist.re.kr/handle/201004/98373

Appears in Collections:

KIST Conference Paper > Others

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