Excimer laser annealing of sol-gel derived PZT thin films

Authors
Do Young HoKang Min GyuOh Seung minKANG, CHONG YUNYOON, SEOK JIN
Citation
한국전기전자재료학회 2010년도 하계학술대회
Keywords
Excimer laser annealing; PZT; Dielectric; Sol-gel
URI
https://pubs.kist.re.kr/handle/201004/98496
Appears in Collections:
KIST Conference Paper > Others
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