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Fabrication and characterization of silicon device for flow measurement (I)

Title
Fabrication and characterization of silicon device for flow measurement (I)
Authors
강광남; 이정일; 오명환; 김형곤; 주병권; 이명복
Keywords
실리콘 소자
Issue Date
1993-01
Publisher
한국재료학회지; Korean journal of materials research
Citation
VOL 3, NO 1, 28-32
URI
https://pubs.kist.re.kr/handle/201004/9850
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KIST Publication > Article
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