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Low temperature processing of PZT thin films with Excimer laser annealing

Authors

Do Young Ho; Kang Min Gyu; Oh Seung min; KIM, JIN SANG; KANG, CHONG YUN; YOON, SEOK JIN

Citation

7th International Workshop on Piezoelectric Materials and Applications in Actuators

URI

https://pubs.kist.re.kr/handle/201004/98513

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KIST Conference Paper > Others

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