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dc.contributor.authorDo Young Ho-
dc.contributor.authorKang Min Gyu-
dc.contributor.authorOh Seung min-
dc.contributor.authorKIM, JIN SANG-
dc.contributor.authorKANG, CHONG YUN-
dc.contributor.authorYOON, SEOK JIN-
dc.date.accessioned2024-01-12T22:36:45Z-
dc.date.available2024-01-12T22:36:45Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/98513-
dc.languageEnglish-
dc.titleLow temperature processing of PZT thin films with Excimer laser annealing-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation7th International Workshop on Piezoelectric Materials and Applications in Actuators-
dc.citation.title7th International Workshop on Piezoelectric Materials and Applications in Actuators-
dc.citation.conferencePlaceTU-

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