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Piezoelectric microcantilever sensors for highly sensitive detection in gas pahse

Authors

Lee Min Hyuck; Kim, Kang-min; Kim Sang Kyung; Park, Jung Ho; Kang, Ji Yoon; Kim, Tae Song; Hwang, Kyo Seon

Citation

한국 MEMS 학술대회

URI

https://pubs.kist.re.kr/handle/201004/98617

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KIST Conference Paper > Others

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