레이저 리프트 오프 방법을 이용한 산화물 박막 평면 소자의 제조 방법

Author
강종윤윤석진도영호백승협최지원송현철김진상
Assignee
한국과학기술연구원
Regitration Date
2014-09-09
Registration No.
8828845
Application Date
2012-12-13
Application No.
13/713396
Country
US
URI
https://pubs.kist.re.kr/handle/201004/98631
Appears in Collections:
KIST Patent > 2012
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