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Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir, and IrOx films deposited by RF sputtering

Other Titles

RF sputtering 방법으로 증착된 인체 삽입형 신경전극(Pt, Ir, IrOx)의 공정 방법 및 특성 비교분석

Authors

Jung jung hwan; Kang, Ji Yoon; Kim, Tae Song; Lee, Soo Hyun

Citation

한국 MEMS 학술대회

Keywords

cuff electrode; CDC; EIS; working pressure

URI

https://pubs.kist.re.kr/handle/201004/98942

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KIST Conference Paper > Others

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