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Measurements of lattice strain in SiO//2Si interface using convergent beam electron diffraction.

Title: Measurements of lattice strain in SiO//2Si interface using convergent beam electron diffraction.

Authors: 김긍호; 우현정; 최두진

Keywords: lattice strain

Issue Date: 1995-01

Publisher: 한국전자현미경학회지; Korean journal of electron microscopy

Citation: v. 25, no. 2, 73-79

URI: https://pubs.kist.re.kr/handle/201004/9907

Appears in Collections:: KIST Publication > Article

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