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Crystallization behavior of amorphous SiNx, BN and CNx phase with transition metal nitride (TiAlN and ZrN) layer in nanoscale multilayered coating

Authors

JONG-KEUK, PARK; Baik, Young Joon; Lee, Wook Seong

Citation

12th International Conference on Plasma Surface Engineering (PSE 2010)

Keywords

nanoscale multilayered coating; crystallization; amorphous nitride phase; hardness; metal nitride

URI

https://pubs.kist.re.kr/handle/201004/99110

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KIST Conference Paper > Others

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