기포를 이용한 미소 전자 기계 구조의 발전장치

Author
이윤표이대영김경호김광호김영일김호영김서영
Assignee
한국과학기술연구원
Regitration Date
2004-10-19
Registration No.
6,806,624
Application Date
2002-11-08
Application No.
10/291,138
Country
US
URI
https://pubs.kist.re.kr/handle/201004/99378
Appears in Collections:
KIST Patent > 2002
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