미소 전자 기계 구조의 발전기

Author
김광호송귀은전재학이윤표
Assignee
한국과학기술연구원
Regitration Date
2006-12-14
Registration No.
DE 602 12 054 T2
Application Date
2002-09-18
Application No.
02020901.1
URI
https://pubs.kist.re.kr/handle/201004/99396
Appears in Collections:
KIST Patent > 2002
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