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다층박막법을　이용한　반도체　소자의　제조방법

Author

문성욱; 오명환; 김민철

Assignee

한국과학기술연구원

Regitration Date

2002-03-07

Registration No.

329241

Application Date

2000-05-04

Application No.

00-23920

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/99455

Appears in Collections:

KIST Patent > 2000

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