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Properties of ZnO:Al Films Prepared by RF and DC Magnetron Sputtering at Various Temperature

Authors

Jung, Sung Mok; Kim, Young-Hwan; Kim, Seong Il; Sang-Im Yoo

Citation

2010 춘계 한국세라믹학회

Keywords

ZnO:Al film; transparent conducting oxide; RF/DC magnetron sputtering

URI

https://pubs.kist.re.kr/handle/201004/99557

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KIST Conference Paper > Others

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