DSpace at KIST: Properties of ZnO:Al Films Prepared by RF and DC Magnetron Sputtering at Various Temperature

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DC Field	Value	Language
dc.contributor.author	Jung, Sung Mok	-
dc.contributor.author	Kim, Young-Hwan	-
dc.contributor.author	Kim, Seong Il	-
dc.contributor.author	Sang-Im Yoo	-
dc.date.accessioned	2024-01-12T23:35:17Z	-
dc.date.available	2024-01-12T23:35:17Z	-
dc.date.created	2021-09-29	-
dc.identifier.uri	https://pubs.kist.re.kr/handle/201004/99557	-
dc.language	English	-
dc.subject	ZnO:Al film	-
dc.subject	transparent conducting oxide	-
dc.subject	RF/DC magnetron sputtering	-
dc.title	Properties of ZnO:Al Films Prepared by RF and DC Magnetron Sputtering at Various Temperature	-
dc.type	Conference	-
dc.description.journalClass	2	-
dc.identifier.bibliographicCitation	2010 춘계 한국세라믹학회	-
dc.citation.title	2010 춘계 한국세라믹학회	-
dc.citation.conferencePlace	KO	-

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