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Characterization of fluorocarbon fhin films deposited by ICP and PP

Authors

Lee Ji-hye; K. Kim; LEE, YEON HEE

Citation

5th International symposium on practical surface on practical surface analysis, v.5, pp.164

Keywords

fluorocarbon; pulsed plasma; ICP; XPS; TOF-SIMS

URI

https://pubs.kist.re.kr/handle/201004/99560

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KIST Conference Paper > Others

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